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None of those come in a package nearly as small.


The data sheet claims that the ATtiny1634-UUR is 2.38x2.02mm, which to me does not seem all that much larger than the chips under discussion.


Ah, you are entirely correct. I didn't see the -U in the listing on Atmel's site, but it is indeed in the datasheet. The ball layout is a pain to route though, 0.4mm pitch.




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