I'm guessing most recent dissertations have been digitized, but this is probably the norm only in the last 10-15 years? Most universities likely have never given thought to digitize anything from before then due to the extra costs that would be involved in digitizing those physical copies. I am curious how much such an effort would cost though.
I should have qualified this with "the engineering departments at UC Berkeley". Everything we put out (papers, technical reports, open source software) was on the Internet. Formats were varied; LaTeX and Postscript were commonly used. PDF a bit later.