>indicates that is probably a technological dead-end.
Which is why IMO PRC exploring SSMB /synchrotron EUV is so interesting.
IIRC EUV development picked plasma over synchrotron because plasma projected to be cheaper, even though technically synchrotron had more benefits. Queue many, many years of technical challenges and now commercialized EUV machines cost 200m, 400m for next high NA. Which is about the cost of multiple small or single medium size synchrotron facility in west. TLDR is it's amazing plasma EUV works, but it's also a failure in the sense that it is FAR less economical than originally envisioned. Economical dead end if PRC ever figures out cheaper alternative tools AND doesn't have to pay IP fees which they would have operating under western ecosystem.
Which is why IMO PRC exploring SSMB /synchrotron EUV is so interesting.
IIRC EUV development picked plasma over synchrotron because plasma projected to be cheaper, even though technically synchrotron had more benefits. Queue many, many years of technical challenges and now commercialized EUV machines cost 200m, 400m for next high NA. Which is about the cost of multiple small or single medium size synchrotron facility in west. TLDR is it's amazing plasma EUV works, but it's also a failure in the sense that it is FAR less economical than originally envisioned. Economical dead end if PRC ever figures out cheaper alternative tools AND doesn't have to pay IP fees which they would have operating under western ecosystem.