Would it even work I think is the more meaningful question. Last I heard we we having trouble with electrons tunneling across the gates as we got smaller.
You have to start wondering if they will use quantum behaviour like Anderson localisation that sets up a standing wave effectively stopping electrons from tunnelling in certain places (design it to bias against and/or stop gate leak tunnelling). Svitlana Mayboroda discovered a lanscape function that allows you to predict (and hence design) this kind of behaviour. As to how actively using these kinds of quantum behaviour affects feature size / speeds / feeds / yields will probably eat several tens of millions / years as well.
