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A lot of the stuff, e.g. 193i immersion litho, gets reused the by the fabs, other stuff gets used for older nodes, which are often still thriving, e.g. 180nm is popping for analog.



Also, some of it just gets trashed. I remember seeing photos of a bunch of equipment just sitting away rusting slowly in a parking lot somewhere in (I think) the UK. Obsolete node and wafer size, no real market for it.




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