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Can anyone recommend a few books on chip manufacturing? I am completely blown away at the scale they are working with here. I'm particularly interested in a "how it's made" type book. This is obviously something that requires significant upfront investment. The scale makes this seem so difficult. I'm a total newb is this area so I might not even be asking the right questions yet.

Back in the 80s I took a freshman lab course on this at Caltech. The course notes were available at the campus bookstore, but I don't think they were ever a proper book with an ISBN (and I hope there's something newer, though maybe there's not much new to say about the kind of crude small-scale ICs we got to make in the lab).

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